

Pneumatic Right Angle High Vacuum Valves
NW (KF, QF) Flange Ports
• Viton Seals (Fluorocarbon, FKM)
• HV Elastomer Sealed Poppet Valves
• Bellows Sealed SS Angle Valve
• PRV Series High Vacuum Valve
Pneumatically Actuated
• Air Open, Spring Close
PRV-NW Series - New Design
Features
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Pneumatic connection:
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1/8” NPT-F
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Mounting position:
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Any
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Operating pressure range:
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1000 Torr ~ 1x10-8 Torr
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Leak rate:
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1 x 10-9
Torr l/s, He
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Pneumatic operating pressure:
(Minimum ~ Maximum)
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4 bar ~ 5.5 bar 60 psi ~ 80 psi
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Temperatures
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Valve body:
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250°C Open, 200°C Closed
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Actuator
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100°C
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Bake-out:
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100°C
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Materials
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Feedthrough:
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Welded Bellows in AM350
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Valve body:
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SUS304/304L
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Mechanism:
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SUS304/304L
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Actuator:
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Aluminum
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